Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan
نویسندگان
چکیده
Abstract With the progress in nanotechnology, importance of nanodimensional standards is increasing. Realizing requires multiple types high-precision microscopy techniques. The National Metrology Institute Japan (NMIJ), one research domains Advanced Industrial Science and Technology (AIST), developing using atomic force, transmission electron, scanning electron microscopes. current status NMIJ introduced herein.
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ژورنال
عنوان ژورنال: Nanomanufacturing and Metrology
سال: 2021
ISSN: ['2520-811X', '2520-8128']
DOI: https://doi.org/10.1007/s41871-021-00119-1